
Keyence VK-X3000 3D Surface Profiler
The VK-X3000 is a versatile 3D surface profiling system that combines multiple measurement modes to provide both nanoscale resolution and large-area scanning. It is designed to handle a wide range of samples—including transparent, reflective, or steeply angled surfaces—making it an excellent tool for researchers across materials science, engineering, and life sciences.
Technical Capabilities:
Triple-scan technology: Integrates laser confocal scanning, focus variation, and white-light interferometry for high-accuracy measurements.
Resolution and accuracy:
Down to 0.01 nm in white-light mode.
Violet laser (VK-X3100 head) with 0.1 nm resolution and ±(0.2 + L/100) µm accuracy (50× lens).
Scanning range:
Area up to 50 × 50 mm (1.97″ × 1.97″).
Motorized 100 × 100 mm XY stage for larger sample positioning.
Automation and software:
Batch processing and image stitching.
API access for custom workflows.
Full data export for external analysis.
Film thickness measurement:
Range: 100–5000 nm.
Repeatability: 0.1 nm, with ±0.6% accuracy.
Sample compatibility: Works with transparent, mirrored, or high-aspect ratio surfaces with large height changes.