Keyence Laser Scanning Microscope VK-X3050

Keyence Laser Scanning Microscope VK-X3050
Keyence VK-X3000 3D Surface Profiler​

The VK-X3000 is a versatile 3D surface profiling system that combines multiple measurement modes to provide both nanoscale resolution and large-area scanning. It is designed to handle a wide range of samples—including transparent, reflective, or steeply angled surfaces—making it an excellent tool for researchers across materials science, engineering, and life sciences.​

Technical Capabilities:

  • Triple-scan technology: Integrates laser confocal scanning, focus variation, and white-light interferometry for high-accuracy measurements.​

Resolution and accuracy:​

  • Down to 0.01 nm in white-light mode.​

  • Violet laser (VK-X3100 head) with 0.1 nm resolution and ±(0.2 + L/100) µm accuracy (50× lens).​

Scanning range:​

  • Area up to 50 × 50 mm (1.97″ × 1.97″).​

  • Motorized 100 × 100 mm XY stage for larger sample positioning.​

Automation and software:​

  • Batch processing and image stitching.​

  • API access for custom workflows.​

  • Full data export for external analysis.​

Film thickness measurement:​

  • Range: 100–5000 nm.​

  • Repeatability: 0.1 nm, with ±0.6% accuracy.​

  • Sample compatibility: Works with transparent, mirrored, or high-aspect ratio surfaces with large height changes.​